검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Role of Nitrogen in the Downstream Etching of Silicon-Nitride Blain MG, Meisenheimer TL, Stevens JE Journal of Vacuum Science & Technology A, 14(4), 2151, 1996 |
| 2 |
In-Situ Wafer Temperature Monitoring of Silicon Etching Using Diffuse-Reflectance Spectroscopy Booth JL, Beard BT, Stevens JE, Blain MG, Meisenheimer TL Journal of Vacuum Science & Technology A, 14(4), 2356, 1996 |