화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Progress in Mask Technology for Ion-Implantation Based Nanofabrication
Burkard M, Griesinger UA, Menschig A, Schweizer H, Klein H, Bohm G, Trankle G, Weimann G
Journal of Vacuum Science & Technology B, 12(6), 3677, 1994
2 Investigations of Artificial Nanostructures and Lithography Techniques with a Scanning Probe Microscope
Griesinger UA, Kaden C, Lichtenstein N, Hommel J, Lehr G, Bergmann R, Menschig A, Schweizer H, Hillmer H, Koops HW, Kretz J, Rudolph M
Journal of Vacuum Science & Technology B, 11(6), 2441, 1993