검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Topography simulation for the virtual wafer fab Cale TS, Merchant TP, Borucki LJ, Labun AH Thin Solid Films, 365(2), 152, 2000 |
| 2 |
Multiple scale integrated modeling of deposition processes Merchant TP, Gobbert MK, Cale TS, Borucki LJ Thin Solid Films, 365(2), 368, 2000 |
| 3 |
A Multiscale Simulator for Low-Pressure Chemical-Vapor-Deposition Gobbert MK, Merchant TP, Borucki LJ, Cale TS Journal of the Electrochemical Society, 144(11), 3945, 1997 |
| 4 |
A Systematic-Approach to Simulating Rapid Thermal-Processing Systems Merchant TP, Cole JV, Knutson KL, Hebb JP, Jensen KF Journal of the Electrochemical Society, 143(6), 2035, 1996 |