화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Ag metallization on silicides with nitride barriers
Mitan MM, Kim HC, Alford TL, Mayer JW, Malgas GF, Adams D
Journal of Vacuum Science & Technology B, 22(6), 2804, 2004
2 Patterning of nanometer-scale silicide structures on silicon by'direct writing focus ion-beam implantation'
Mitan MM, Pivin DP, Alford TL, Mayer JW
Thin Solid Films, 411(2), 219, 2002
3 Direct patterning of nanometer-scale silicide structures by focused ion-beam implantation through a thin barrier layer
Mitan MM, Pivin DP, Alford TL, Mayer JW
Journal of Vacuum Science & Technology B, 19(6), 2525, 2001