검색결과 : 3건
No. | Article |
---|---|
1 |
Ag metallization on silicides with nitride barriers Mitan MM, Kim HC, Alford TL, Mayer JW, Malgas GF, Adams D Journal of Vacuum Science & Technology B, 22(6), 2804, 2004 |
2 |
Patterning of nanometer-scale silicide structures on silicon by'direct writing focus ion-beam implantation' Mitan MM, Pivin DP, Alford TL, Mayer JW Thin Solid Films, 411(2), 219, 2002 |
3 |
Direct patterning of nanometer-scale silicide structures by focused ion-beam implantation through a thin barrier layer Mitan MM, Pivin DP, Alford TL, Mayer JW Journal of Vacuum Science & Technology B, 19(6), 2525, 2001 |