검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Growth of SiC films using tetraethylsilane Kubo N, Kawase T, Asahina S, Kanayama N, Tsuda H, Moritani A, Kitahara K Materials Science Forum, 457-460, 269, 2004 |
| 2 |
In situ spectroscopic ellipsometry of carbon nucleation and growth on Si in a deposition process by DC glow discharge of methane Moritani A, Kitahara K, Kitamura T, Katayama H, Kanayama N, Suzuki M Thin Solid Films, 386(2), 137, 2001 |
| 3 |
Hydrogenation of laser-crystallized poly-silicon thin films and characterization of defects using a catalytic method Kitahara K, Nogi H, Moritani A Thin Solid Films, 395(1-2), 92, 2001 |
| 4 |
In situ spectroscopic ellipsometry for plasma-carburising process Moritani A, Yamada T, Kitamura T, Katayama H, Noda Y, Kanayama N Thin Solid Films, 374(2), 298, 2000 |