화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Bulk and surface micromachined MEMS in thin film SOI technology
Raskin JP, Iker F, Andre N, Olbrechts B, Pardoen T, Flandre D
Electrochimica Acta, 52(8), 2850, 2007
2 Planar double-gate SOI MOS devices: Fabrication by wafer bonding over pre-patterned cavities and electrical characterization
Chung TM, Olbrechts B, Sodervall U, Bengtsson S, Flandre D, Raskin JP
Solid-State Electronics, 51(2), 231, 2007
3 Characterization of FD SOI devices and VCO's on thin dielectric membranes under pressure
Olbrechts B, Rue B, Suski J, Flandre D, Raskin JP
Solid-State Electronics, 51(9), 1229, 2007
4 Electrical characterization of true Silicon-On-Nothing MOSFETs fabricated by Si layer transfer over a pre-etched cavity
Kilchytska V, Chung TM, Olbrechts B, Vovk Y, Raskin JP, Flandre D
Solid-State Electronics, 51(9), 1238, 2007
5 Oxygen plasma and warm nitric acid surface activation for low-temperature wafer bonding
Zhang XX, Olbrechts B, Raskin JP
Journal of the Electrochemical Society, 153(12), G1099, 2006