검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Fabrication of parallel-plate nanomirror arrays for extreme ultraviolet maskless lithography Shroff Y, Chen YJ, Oldham W Journal of Vacuum Science & Technology B, 19(6), 2412, 2001 |
| 2 |
Maskless extreme ultraviolet lithography Choksi N, Pickard DS, McCord M, Pease RFW, Shroff Y, Chen YJ, Oldham W, Markle D Journal of Vacuum Science & Technology B, 17(6), 3047, 1999 |
| 3 |
Effects of Compaction on 193 nm Lithographic System Performance Schenker R, Oldham W Journal of Vacuum Science & Technology B, 14(6), 3709, 1996 |
| 4 |
Thermal and Acid-Catalyzed Deprotection Kinetics in Candidate Deep-Ultraviolet Resist Materials Wallraff G, Hutchinson J, Hinsberg W, Houle F, Seidel P, Johnson R, Oldham W Journal of Vacuum Science & Technology B, 12(6), 3857, 1994 |