검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Al(2)O(3) thin film growth on Si (100) using binary reaction sequence chemistry (vol 292, pg 135, 1997) Ott AW, Klaus JW, Johnson JM, George SM Thin Solid Films, 517(20), 5950, 2009 |
| 2 |
Al3O3 Thin-Film Growth on Si(100) Using Binary Reaction Sequence Chemistry Ott AW, Klaus JW, Johnson JM, George SM Thin Solid Films, 292(1-2), 135, 1997 |
| 3 |
Surface-Chemistry for Atomic Layer Growth George SM, Ott AW, Klaus JW Journal of Physical Chemistry, 100(31), 13121, 1996 |