검색결과 : 12건
| No. | Article |
|---|---|
| 1 |
Copper filling of deep sub-mu m through-holes by high-vacuum planar magnetron sputtering using argon gas with added oxygen Uhara Y, Urano T, Itoh M, Hayashi H, Manba Y, Taniseki A, Jyan H, Nishikawa E, Saito S Applied Surface Science, 256(4), 1240, 2009 |
| 2 |
Photomodulation study in CdS thin films grown by sputtering in a large area Ximello-Quiebras JN, Mejia-Garcia C, Caballero-Rosas A, Hernandez-Contreras H, Contreras-Puente G, Vidal J, Pascher H Thin Solid Films, 431-432, 223, 2003 |
| 3 |
MgO deposition using reactive ionized sputtering Matsuda Y, Koyama Y, Tashiro K, Fujiyama H Thin Solid Films, 435(1-2), 154, 2003 |
| 4 |
US and CdTe large area thin films processed by radio-frequency planar-magnetron sputtering Hernandez-Contreras H, Contreras-Puente G, Aguilar-Hernandez J, Morales-Acevedo A, Vidal-Larramendi J, Vigil-Galan O Thin Solid Films, 403-404, 148, 2002 |
| 5 |
Hollow cathode magnetron Wang ZH, Cohen SA Journal of Vacuum Science & Technology A, 17(1), 77, 1999 |
| 6 |
Hollow cathode magnetrons with target gas feed Bradley JW, Willett DM, Gonzalvo YA Journal of Vacuum Science & Technology A, 17(6), 3333, 1999 |
| 7 |
Directional copper deposition using dc magnetron self-sputtering Radzimski ZJ, Posadowski WM, Rossnagel SM, Shingubara S Journal of Vacuum Science & Technology B, 16(3), 1102, 1998 |
| 8 |
Thickness Dependence of Refractive-Index for Anodic Aluminum-Oxide Films Chiu RL, Chang PH Journal of Materials Science Letters, 16(2), 174, 1997 |
| 9 |
Hollow-Cathode Assisted Sputtering Backhouse CJ, Dew SK, Brett MJ Journal of Vacuum Science & Technology A, 14(4), 2674, 1996 |
| 10 |
Modeling of Lift-Off Sputter-Deposition and Application to Fabrication of a Microlens Serikawa T, Shirai S Thin Solid Films, 281-282, 246, 1996 |