화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Nanoscale FinFETs for low power applications
Rosner W, Landgraf E, Kretz J, Dreeskornfeld L, Schafer H, Stadele M, Schulz T, Hofmann F, Luyken RJ, Specht M, Hartwich J, Pamler W, Risch L
Solid-State Electronics, 48(10-11), 1819, 2004
2 Thickness Determination of Thin Oxide Layers at the Bottom of Contact Holes of Semiconductor-Devices by Auger-Electron Spectroscopy
Pamler W, Mathuni J
Journal of Vacuum Science & Technology A, 12(1), 12, 1994