검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Thermostable trilayer resist for niobium lift-off Dubos P, Charlat P, Crozes T, Paniez P, Pannetier B Journal of Vacuum Science & Technology B, 18(1), 122, 2000 |
| 2 |
Specific behavior of chemically amplified systems with low activation energy under electron-beam exposure : Implementation of 248 and 193 nm resists Mortini B, Tedesco S, Dal'Zotto B, Paniez P Journal of Vacuum Science & Technology B, 15(6), 2534, 1997 |