검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Use of microfabricated cold field emitters in sub-100 nm maskless lithography Gu GX, Tokunaga K, Yin E, Tsai FC, Brodie AD, Parker NW Journal of Vacuum Science & Technology B, 19(3), 862, 2001 |
| 2 |
Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system Yin E, Brodie AD, Tsai FC, Guo GX, Parker NW Journal of Vacuum Science & Technology B, 18(6), 3126, 2000 |