검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Structural, mechanical and piezoelectric properties of polycrystalline AlN films sputtered on titanium bottom electrodes Patru M, Isac L, Cunha L, Martins P, Lanceros-Mendez S, Oncioiu G, Cristea D, Munteanu D Applied Surface Science, 354, 267, 2015 |
| 2 |
Composition and structure variation for magnetron sputtered tantalum oxynitride thin films, as function of deposition parameters Cristea D, Patru M, Crisan A, Munteanu D, Craciun D, Barradas NP, Alves E, Apreutesei M, Moura C, Cunha L Applied Surface Science, 358, 508, 2015 |