검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Identification of Plasma-Induced Failure Modes in the Development of a Bipolar-Complementary Metal-Oxide-Semiconductor Process Hackenberg JJ, Dion MJ, Hemmenway DF, Pearce LG, Werner JW Journal of Vacuum Science & Technology A, 13(3), 943, 1995 |