검색결과 : 2건
No. | Article |
---|---|
1 |
Electrical properties of CoSi2 precipitates in cobalt-implanted silicon : a conducting atomic force microscopy study Mao JM, Xu JB, Peng QC, Wong SP, Wilson IH Journal of Materials Science Letters, 17(3), 219, 1998 |
2 |
Characterization of Buried Cobalt Silicide Layers in Si by MEVVA Implantation Peng QC, Wong SP, Wilson IH, Wang N, Fung KK Thin Solid Films, 270(1-2), 573, 1995 |