화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Influence of the Initial Nitrogen-Content in Titanium Films on the Nitridation and Silicidation Processes
Jimenez C, Perezrigueiro J, Vazquez L, Fernandez M, Perezcasero R, Martinezduart JM
Thin Solid Films, 305(1-2), 185, 1997
2 Nonlinear-Analysis of the I-V Characteristics in Ti/Si and TiSi2/Si Schottky Diodes
Perezrigueiro J, Jimenez C, Perezcasero R, Martinezduart JM
Journal of Vacuum Science & Technology B, 14(4), 2623, 1996
3 Kinetics and Mechanism of Plasma Oxidation of Tantalum Silicides
Gomezsanroman R, Perezcasero R, Perriere J, Enard JP, Martinezduart JM
Journal of Vacuum Science & Technology A, 13(1), 54, 1995
4 Preparation of Si-TiSi2 Schottky Diodes by Rapid Thermal Annealing
Perezrigueiro J, Jimenez C, Perezcasero R, Martinezduart JM
Thin Solid Films, 246(1-2), 172, 1994