검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament Povolny HS, Deng XM Thin Solid Films, 430(1-2), 125, 2003 |
| 2 |
Hot-wire deposition of amorphous and microcrystalline silicon using different gas excitations by a coiled filament Deng XM, Povolny HS Thin Solid Films, 430(1-2), 304, 2003 |