화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
Schindler P, Logar M, Provine J, Prinz FB
Langmuir, 31(18), 5057, 2015
2 Experimental Investigation of Silicon Surface Migration in Low Pressure Nonreducing Gas Environments
Kant R, Ferralis N, Provine J, Maboudian R, Howe RT
Electrochemical and Solid State Letters, 12(12), H437, 2009
3 Laser print patterning of planar spiral inductors and interdigitated capacitors
Klejwa N, Misra R, Provine J, Howe RT, Klejwa SJ
Journal of Vacuum Science & Technology B, 27(6), 2745, 2009