검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
High density plasma deposited phosphosilicate glass as pre-metal dielectrics for advanced self-aligned contacts in sub 0.25 mu m device technology Yu JYE, Qiao JM, Jin B, Gopalan P, Feng JG Journal of Vacuum Science & Technology B, 17(5), 2272, 1999 |
| 2 |
Development of self-aligned contact technology for 0.18 mu m static random access memory devices Qiao JM, Jin B, Phatak P, Yu JY, Geha S Journal of Vacuum Science & Technology B, 17(5), 2373, 1999 |