검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Fabrication of self-aligned silicon field emission devices and effects of surface passivation on emission current Rakhshandehroo MR, Pang SW Journal of Vacuum Science & Technology B, 16(2), 765, 1998 |
| 2 |
Dry etching of Si field emitters and high aspect ratio resonators using an inductively coupled plasma source Rakhshandehroo MR, Weigold JW, Tian WC, Pang SW Journal of Vacuum Science & Technology B, 16(5), 2849, 1998 |
| 3 |
Field emission from gated Si emitter tips with precise gate tip spacing, gate diameter, tip sharpness, and tip protrusion Rakhshandehroo MR, Pang SW Journal of Vacuum Science & Technology B, 15(6), 2777, 1997 |
| 4 |
Simulation and Dry-Etching of Field Emitter Tips in Si Rakhshandehroo MR, Sukardi F, Pang SW Journal of Vacuum Science & Technology A, 14(3), 1832, 1996 |
| 5 |
Fabrication of Si Field Emitters by Dry-Etching and Mask Erosion Rakhshandehroo MR, Pang SW Journal of Vacuum Science & Technology B, 14(2), 612, 1996 |
| 6 |
Sharpening Si Field Emitter Tips by Dry-Etching and Low-Temperature Plasma Oxidation Rakhshandehroo MR, Pang SW Journal of Vacuum Science & Technology B, 14(6), 3697, 1996 |