화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Thin film micro- and polycrystalline silicon nip cells on stainless steel made by hot-wire chemical vapour deposition
Li H, Stolk RL, van der Werf CHM, Rusche MYS, Rath JK, Schropp REI
Thin Solid Films, 501(1-2), 276, 2006
2 The influence of the filament temperature on the structure of hot-wire deposited silicon
van der Werf CHM, van Veenendaal PATT, van Veen MK, Hardeman AJ, Rusche MYS, Rath JK, Schropp REI
Thin Solid Films, 430(1-2), 46, 2003
3 Deposition of HWCVD poly-Si films at a high growth rate
Rath JK, Hardeman AJ, van der Werf CHM, van Veenendaal PATT, Rusche MYS, Schropp REI
Thin Solid Films, 430(1-2), 67, 2003