검색결과 : 3건
No. | Article |
---|---|
1 |
Vertical Thin-Film-Edge Field Emitters - Fabrication by Chemical Beam Deposition, Imaging of Cathodoluminescence and Characterization of Emission Hsu DS, Gray HF Thin Solid Films, 286(1-2), 92, 1996 |
2 |
Selective-Area Platinum Silicide Film Deposition Using a Molecular Precursor Chemical Beam Source Hsu DS, Troilo LM, Turner NH, Pierson KW Thin Solid Films, 269(1-2), 21, 1995 |
3 |
10th Micrometer Trench Fabrication by Aperture Narrowing of 0.6-Mu-M Starting Mask Structures Using Chemical-Beam Deposition and Ion-Beam Redeposition Hsu DS Journal of Vacuum Science & Technology B, 12(5), 3048, 1994 |