검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Intrinsic Resputtering During Film Deposition Investigated by Monte-Carlo Simulation Bauer W, Betz G, Bangert H, Bergauer A, Eisenmengersittner C Journal of Vacuum Science & Technology A, 12(6), 3157, 1994 |
| No. | Article |
|---|---|
| 1 |
Intrinsic Resputtering During Film Deposition Investigated by Monte-Carlo Simulation Bauer W, Betz G, Bangert H, Bergauer A, Eisenmengersittner C Journal of Vacuum Science & Technology A, 12(6), 3157, 1994 |