검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Trench etch processes for dual damascene patterning of low-k dielectrics Jiang P, Celii FG, Dostalik WW, Newton KJ, Sakima H Journal of Vacuum Science & Technology A, 19(4), 1388, 2001 |
| 2 |
Process characterization for tapered contact etch Celii FG, He Q, Liu HY, DeBord JR, Sakima H Journal of Vacuum Science & Technology B, 19(5), 1845, 2001 |