검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Quantifying leak rates in gas handling systems Extrand CW, Ware D, Kirchgessner J, Schlueter J Industrial & Engineering Chemistry Research, 47(4), 1304, 2008 |
| 2 |
Raman and infrared studies of the sharp 890 cm(-1) mode in organic superconductors Eldridge JE, Lin Y, Schlueter J, Wang HH, Kini AM Molecular Crystals and Liquid Crystals, 380, 93, 2002 |
| 3 |
Exploring CMP solutions to planarity challenges with tungsten plugs Mendonca J, Murella K, Kim I, Schlueter J, Karlsrud C Thin Solid Films, 320(1), 103, 1998 |
| 4 |
Film Property Comparison of Ti/Tin Deposited by Collimated and Uncollimated Physical Vapor-Deposition Techniques Wang SQ, Schlueter J Journal of Vacuum Science & Technology B, 14(3), 1837, 1996 |
| 5 |
Step Coverage Comparison of Ti/Tin Deposited by Collimated and Uncollimated Physical Vapor-Deposition Techniques Wang SQ, Schlueter J, Gondran C, Boden T Journal of Vacuum Science & Technology B, 14(3), 1846, 1996 |
| 6 |
Collimated Ti/Tin Contact and Barrier Layers for Sub 0.5 Mu-M CVD W-Filled Contact Holes Biberger M, Jackson S, Tkach G, Schlueter J, Jones B, Huang CK, Ouellet L Thin Solid Films, 270(1-2), 522, 1995 |