검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Oxygen to silicon ratio determination of SiOXHY thin films Andres ES, del Prado A, Martil I, Gonzalez-Diaz G, Bohne W, Rohrich J, Selle B, Sieber I, Fernandez M Thin Solid Films, 492(1-2), 232, 2005 |
| 2 |
Low-temperature silicon homoepitaxial growth by pulsed magnetron sputtering Reinig P, Fenske F, Selle B, Bohne W, Rohrich J, Sieber I, Fuhs W Applied Surface Science, 227(1-4), 114, 2004 |
| 3 |
Homo-epitaxial Si absorber layers grown by low-temperature ECRCVD Rau B, Sieber I, Selle B, Brehme S, Knipper U, Gall S, Fuhs W Thin Solid Films, 451-52, 644, 2004 |
| 4 |
Crystalline silicon films sputtered on molybdenum - A study of the silicon-molybdenum interface Reinig P, Fenske F, Fuhs W, Schopke A, Selle B Applied Surface Science, 210(3-4), 301, 2003 |
| 5 |
Low-temperature epitaxial growth of B doped Si films on Si(100) and Si(111) Schwarzkopf J, Selle B, Schmidbauer M, Fuhs W Thin Solid Films, 427(1-2), 274, 2003 |
| 6 |
Highly < 100 >-oriented growth of polycrystalline silicon films on glass by pulsed magnetron sputtering Reinig P, Selle B, Fenske F, Fuhs W, Alex V, Birkholz M Journal of Vacuum Science & Technology A, 20(6), 2004, 2002 |
| 7 |
Pulsed dc magnetron-sputtering of microcrystalline silicon Reinig P, Alex V, Fenske F, Fuhs W, Selle B Thin Solid Films, 403-404, 86, 2002 |
| 8 |
Composition and morphology studies of ultrathin CaF2 epitaxial films on silicon Bohne W, Rohrich J, Schmidt M, Schopke A, Selle B, Wurz R Applied Surface Science, 179(1-4), 73, 2001 |
| 9 |
Low-temperature epitaxial growth of Si by electron cyclotron resonance chemical vapor deposition Platen J, Selle B, Sieber I, Brehme S, Zeimer U, Fuhs W Thin Solid Films, 381(1), 22, 2001 |
| 10 |
Free-carrier plasma resonance effects and electron transport in reactively sputtered degenerate ZnO : Al films Brehme S, Fenske F, Fuhs W, Nebauer E, Poschenrieder M, Selle B, Sieber I Thin Solid Films, 342(1-2), 167, 1999 |