검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Deposition of microcrystalline silicon in electron-cyclotron resonance discharge (24 GHz) plasma from silicon tetrafluoride precursor Mansfeld DA, Vodopyanov AV, Golubev SV, Sennikov PG, Mochalov LA, Andreev BA, Drozdov YN, Drozdov MN, Shashkin VI, Bulkine P, Cabarrocas PRI Thin Solid Films, 562, 114, 2014 |
| 2 |
Novel technique for monitoring of MOVPE processes Volkov PV, Goryunov AV, Daniltsev VM, Luk'yanov AY, Pryakhin DA, Tertyshnik AD, Khrykin OI, Shashkin VI Journal of Crystal Growth, 310(23), 4724, 2008 |
| 3 |
InGaAsN/GaAs QD and QW structures grown by MOVPE Daniltsev VM, Drozdov MN, Drozdov YN, Gaponova DM, Khrykin OI, Murel AV, Shashkin VI, Vostokov NV Journal of Crystal Growth, 248, 343, 2003 |