화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Ga+ beam lithography for suspended lateral beams and nanowires
Henry MD, Shearn M, Scherer A
Journal of Vacuum Science & Technology B, 28(6), C6F26, 2010
2 Advanced silicon processing for active planar photonic devices
Shearn M, Diest K, Sun XK, Zadok A, Atwater H, Yariv A, Scherer A
Journal of Vacuum Science & Technology B, 27(6), 3180, 2009
3 Terahertz all-optical modulation in a silicon-polymer hybrid system
Hochberg M, Baehr-Jones T, Wang GX, Shearn M, Harvard K, Luo JD, Chen BQ, Shi ZW, Lawson R, Sullivan P, Jen AKY, Dalton L, Scherer A
Nature Materials, 5(9), 703, 2006