검색결과 : 3건
No. | Article |
---|---|
1 |
Ga+ beam lithography for suspended lateral beams and nanowires Henry MD, Shearn M, Scherer A Journal of Vacuum Science & Technology B, 28(6), C6F26, 2010 |
2 |
Advanced silicon processing for active planar photonic devices Shearn M, Diest K, Sun XK, Zadok A, Atwater H, Yariv A, Scherer A Journal of Vacuum Science & Technology B, 27(6), 3180, 2009 |
3 |
Terahertz all-optical modulation in a silicon-polymer hybrid system Hochberg M, Baehr-Jones T, Wang GX, Shearn M, Harvard K, Luo JD, Chen BQ, Shi ZW, Lawson R, Sullivan P, Jen AKY, Dalton L, Scherer A Nature Materials, 5(9), 703, 2006 |