검색결과 : 2건
No. | Article |
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1 |
Electron-beam lithography of multiple-layer submicrometer periodic arrays on a barium fluoride substrate Tharp JS, Shelton DJ, Wadsworth SL, Boreman GD Journal of Vacuum Science & Technology B, 26(5), 1821, 2008 |
2 |
Fabrication of periodic microstructures on flexible polyimide membranes Shelton DJ, Tharp JS, Zummo G, Folks WR, Boreman GD Journal of Vacuum Science & Technology B, 25(6), 1827, 2007 |