검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of the novel electron bombardment anneal system (EBAS) for SiC post ion implantation anneal Shibagaki M, Kurematsu Y, Watanabe F, Haga S, Miura K, Suzuki T, Satoh M Materials Science Forum, 483, 609, 2005 |
| No. | Article |
|---|---|
| 1 |
Development of the novel electron bombardment anneal system (EBAS) for SiC post ion implantation anneal Shibagaki M, Kurematsu Y, Watanabe F, Haga S, Miura K, Suzuki T, Satoh M Materials Science Forum, 483, 609, 2005 |