검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Spectral analysis of line-edge roughness in polyphenol EB-resists and its impact on transistor performance Yamaguchi A, Fukuda H, Arai T, Yamamoto J, Hirayama T, Shiono D, Hada H, Onodera J Journal of Vacuum Science & Technology B, 23(6), 2711, 2005 |