검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3 Park K, Yun WD, Choi BJ, Kim HD, Lee WJ, Rha SK, Park CO Thin Solid Films, 517(14), 3975, 2009 |
| 2 |
Hot-wall CVD growth of 4H-SiC using Si2Cl6+C3H8+H-2 system Miyanagi T, Nishino S Materials Science Forum, 389-3, 199, 2002 |