검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
SiC materials and technologies for sensors development Godignon P Materials Science Forum, 483, 1009, 2005 |
| 2 |
Bulk micromachining of polycrystalline SiC using Si molds fabricated by deep reactive ion etching Rajan N, Zorman CA, Mehregany M Materials Science Forum, 338-3, 1145, 2000 |