화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Strained SiCMOS (SS CMOS) technology: opportunities and challenges
Rim K, Anderson R, Boyd D, Cardone F, Chan K, Chen H, Christansen S, Chu J, Jenkins K, Kanarsky T, Koester S, Lee BH, Lee K, Mazzeo V, Mocuta A, Mocuta D, Mooney PM, Oldiges P, Ott J, Ronsheim P, Roy R, Steegen A, Yang M, Zhu H, Ieong M, Wong HSP
Solid-State Electronics, 47(7), 1133, 2003
2 Materials aspects, electrical performance, and scalability of Ni silicide towards sub-0.13 mu m technologies
Lauwers A, Steegen A, de Potter M, Lindsay R, Satta A, Bender H, Maex K
Journal of Vacuum Science & Technology B, 19(6), 2026, 2001