화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 A robust 45 nm gate-length CMOSFET for 90 nm Hi-speed technology
Lim KY, Chan V, Rengarajan R, Lee HK, Rovedo N, Lim EH, Yang S, Jamin F, Nguyen P, Lin W, Lai CW, Teh YW, Lee J, Kim L, Luo Z, Ng H, Sudijono J, Wann C, Yang I
Solid-State Electronics, 50(4), 579, 2006
2 Via resistance reduction using "cool'' PVD-Ta processing
Seet CS, Zhang BC, Yong C, Liew SL, Li K, Hsia LC, Seng HL, Osiposwicz T, Sudijono J, Zeng HC, Tan JB
Journal of the Electrochemical Society, 150(12), G766, 2003
3 Cool copper template for the formation of oriented nanocrystalline alpha-tantalum
Yong C, Zhang BC, Seet CS, See A, Chan L, Sudijono J, Liew SL, Tung CH, Zeng HC
Journal of Physical Chemistry B, 106(48), 12366, 2002