검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of a Low-Frequency Inductively-Coupled Plasma Source Tuszewski M, Tobin JA Journal of Vacuum Science & Technology A, 14(3), 1096, 1996 |
| 2 |
Composition of the Oxygen Plasmas from 2 Inductively-Coupled Sources Tuszewski M, Scheuer JT, Tobin JA Journal of Vacuum Science & Technology A, 13(3), 839, 1995 |