Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 839-842, 1995 DOI10.1116/1.579838 Export Citation Composition of the Oxygen Plasmas from 2 Inductively-Coupled Sources Tuszewski M, Scheuer JT, Tobin JA Keywords:STATE Please enable JavaScript to view the comments powered by Disqus.
