| 1 |
5th International Conference on Spectroscopic Ellipsometry (ICSE-V) Preface
Tompkins HG, Diebold A, Jellison GE, Collins R, Aspnes D
Thin Solid Films, 519(9), 2569, 2011 |
| 2 |
Survey of methods to characterize thin absorbing films with Spectroscopic Ellipsometry
Hilfiker JN, Singh N, Tiwald T, Convey D, Smith SM, Baker JH, Tompkins HG
Thin Solid Films, 516(22), 7979, 2008 |
| 3 |
Measuring the thickness of organic/polymer/biological films on glass substrates using spectroscopic ellipsometry
Tompkins HG, Tiwald T, Bungay C, Hooper AE
Journal of Vacuum Science & Technology A, 24(4), 1605, 2006 |
| 4 |
Use of molecular vibrations to analyze very thin films with infrared ellipsometry
Tompkins HG, Tiwald T, Bungay C, Hooper AE
Journal of Physical Chemistry B, 108(12), 3777, 2004 |
| 5 |
Industrial applications of spectroscopic ellipsometry
Tompkins HG
Thin Solid Films, 455-56, 772, 2004 |
| 6 |
Synergism of transmission measurements with spectroscopic ellipsometry measurements in the analysis of a nearly opaque bimetal film stack on glass
Tompkins HG, Tasic S
Journal of Vacuum Science & Technology A, 18(3), 946, 2000 |
| 7 |
Analysis of silicon oxynitrides with spectroscopic ellipsometry and Auger spectroscopy, compared to analyses by Rutherford backscattering spectrometry and Fourier transform infrared spectroscopy
Tompkins HG, Gregory RB, Deal PW, Smith SM
Journal of Vacuum Science & Technology A, 17(2), 391, 1999 |
| 8 |
Determining thickness of thin metal films with spectroscopic ellipsometry for applications in magnetic random-access memory
Tompkins HG, Zhu T, Chen E
Journal of Vacuum Science & Technology A, 16(3), 1297, 1998 |
| 9 |
5 Layer Stack of Nitride, Oxide, and Amorphous-Silicon on Glass, Analyzed with Spectroscopic Ellipsometry
Tompkins HG, Williams PH
Journal of Vacuum Science & Technology A, 15(3), 992, 1997 |
| 10 |
Uniform low stress oxynitride films for application as hardmasks on x-ray masks
Dauksher WJ, Resnick DJ, Smith SM, Pendharkar SV, Tompkins HG, Cummings KD, Seese PA, Mangat PJS, Chan JA
Journal of Vacuum Science & Technology B, 15(6), 2232, 1997 |
