검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
The Structure, Morphology and Resistivity of in-Situ Phosphorus-Doped Polysilicon Films Lesnikova VP, Turtsevich AS, Krasnitsky VY, Emelyanov VA, Nalivaiko OY, Kravtsov SV, Makarevich TV Thin Solid Films, 247(2), 156, 1994 |
| 2 |
The Effect of Production Conditions for in-Situ Phosphorus-Doped LPCVD Polysilicon in Monosilane Phosphine System on the Deposition Process Kinetics Turtsevich AS, Krasnitsky VY, Emelyanov VA, Nalivaiko OY, Kravtsov SV Thin Solid Films, 248(1), 28, 1994 |