검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Stable and unstable behavior of inductively coupled electronegative discharges Marakhtanov AM, Tuszewski M, Lieberman MA, Chabert P Journal of Vacuum Science & Technology A, 21(6), 1849, 2003 |
| 2 |
Optical properties of diamond-like carbon synthesized by plasma immersion ion processing He XM, Bardeau JF, Lee DH, Walter KC, Tuszewski M, Nastasi M Journal of Vacuum Science & Technology B, 17(2), 822, 1999 |
| 3 |
Characterization of a Low-Frequency Inductively-Coupled Plasma Source Tuszewski M, Tobin JA Journal of Vacuum Science & Technology A, 14(3), 1096, 1996 |
| 4 |
Composition of the Oxygen Plasmas from 2 Inductively-Coupled Sources Tuszewski M, Scheuer JT, Tobin JA Journal of Vacuum Science & Technology A, 13(3), 839, 1995 |
| 5 |
Plasma Immersion Ion-Implantation for Semiconductor Thin-Film Growth Tuszewski M, Scheuer JT, Campbell IH, Laurich BK Journal of Vacuum Science & Technology B, 12(2), 973, 1994 |