검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept Petric P, Bevis C, McCord M, Carroll A, Brodie A, Ummethala U, Grella L, Cheung A, Freed R Journal of Vacuum Science & Technology B, 28(6), C6C6, 2010 |