검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature plasma etching for Si3N4 waveguide applications Celo D, Vandusen R, Smy T, Albert J, Tarr NG, Waldron PD Journal of Vacuum Science & Technology A, 26(2), 253, 2008 |
| No. | Article |
|---|---|
| 1 |
Low temperature plasma etching for Si3N4 waveguide applications Celo D, Vandusen R, Smy T, Albert J, Tarr NG, Waldron PD Journal of Vacuum Science & Technology A, 26(2), 253, 2008 |