화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Characterization and analysis of epitaxial silicon phosphorus alloys for use in n-channel transistors
Weeks KD, Thomas SG, Dholabhai P, Adams J
Thin Solid Films, 520(8), 3158, 2012
2 Monochlorosilane for Low Temperature Silicon Epitaxy
Tomasini P, Weeks KD
Journal of the Electrochemical Society, 158(5), H604, 2011
3 Low temperature, high growth rate epitaxial silicon and silicon germanium alloy films
Todd MA, Weeks KD
Applied Surface Science, 224(1-4), 41, 2004