검색결과 : 3건
No. | Article |
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1 |
Characterization and analysis of epitaxial silicon phosphorus alloys for use in n-channel transistors Weeks KD, Thomas SG, Dholabhai P, Adams J Thin Solid Films, 520(8), 3158, 2012 |
2 |
Monochlorosilane for Low Temperature Silicon Epitaxy Tomasini P, Weeks KD Journal of the Electrochemical Society, 158(5), H604, 2011 |
3 |
Low temperature, high growth rate epitaxial silicon and silicon germanium alloy films Todd MA, Weeks KD Applied Surface Science, 224(1-4), 41, 2004 |