검색결과 : 10건
| No. | Article |
|---|---|
| 1 |
Use of Laser Reflectometry for End-Point Detection During the Etching of Magnetic Thin-Films Khamsehpour B, Wilkinson CD, Chapman JN Journal of Vacuum Science & Technology A, 15(4), 2069, 1997 |
| 2 |
Controlling the Strain and Light-Emission from Si-Si1-xGex Quantum Dots Tang YS, Hicks SE, Ni WX, Torres CM, Hansson GV, Wilkinson CD Thin Solid Films, 294(1-2), 304, 1997 |
| 3 |
High-Resolution Patterning of Thin Magnetic-Films to Produce Ultrasmall Magnetic Elements Khamsehpour B, Wilkinson CD, Chapman JN, Johnston AB Journal of Vacuum Science & Technology B, 14(5), 3361, 1996 |
| 4 |
Dry-Etching Damage in III-V Semiconductors Murad S, Rahman M, Johnson N, Thoms S, Beaumont SP, Wilkinson CD Journal of Vacuum Science & Technology B, 14(6), 3658, 1996 |
| 5 |
Effects of O-2 Addition to Sicl4/Sif4 and the Thickness of the Capping Layer on Gate Recess Etching of GaAs-Pseudomorphic High-Electron-Mobility Transistors Murad SK, Cameron NI, Beaumont SP, Wilkinson CD Journal of Vacuum Science & Technology B, 14(6), 3668, 1996 |
| 6 |
Selective Reactive Ion Etching of InGaAs and InP over InAlAs in Sicl4/Sif4/HBr Plasmas Murad SK, Beaumont SP, Holland M, Wilkinson CD Journal of Vacuum Science & Technology B, 13(6), 2344, 1995 |
| 7 |
Reflectance Modeling for in-Situ Dry Etch Monitoring of Bulk SiO2 and III-V Multilayer Structures Hicks SE, Parkes W, Wilkinson JA, Wilkinson CD Journal of Vacuum Science & Technology B, 12(6), 3306, 1994 |
| 8 |
Magnetically Confined Plasma Reactive Ion Etching of GaAs/AlGaAs/AlAs Quantum Nanostructures Song YP, Wang PD, Torres CM, Wilkinson CD Journal of Vacuum Science & Technology B, 12(6), 3388, 1994 |
| 9 |
Controlling the Profile of Nanostructures Tsutsui K, Hu EL, Wilkinson CD Journal of Vacuum Science & Technology B, 11(6), 2233, 1993 |
| 10 |
Very-Low Damage Etching of GaAs Murad SK, Wilkinson CD, Wang PD, Parkes W, Sotomayortorres CM, Cameron N Journal of Vacuum Science & Technology B, 11(6), 2237, 1993 |