검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Thermal imprint into thin polymer layers below the critical molecular weight Bogdanski N, Wissen M, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 27(3), 1191, 2009 |
| 2 |
Multiple replication of three dimensional structures with undercuts Mollenbeck S, Bogdanski N, Wissen M, Scheer HC, Zajadacz J, Zimmer K Journal of Vacuum Science & Technology B, 25(1), 247, 2007 |
| 3 |
Impact of glass temperature for thermal nanoimprint Scheer HC, Bogdanski N, Wissen M, Mollenbeck S Journal of Vacuum Science & Technology B, 25(6), 2392, 2007 |
| 4 |
Thermal imprint with negligibly low residual layer Bogdanski N, Wissen M, Mollenbeck S, Scheer HC Journal of Vacuum Science & Technology B, 24(6), 2998, 2006 |
| 5 |
Influence of light polarization on UV stabilization of prepatterned resists Wissen M, Bogdanski N, Moellenbeck S, Helm P, Scheer HC Journal of Vacuum Science & Technology B, 24(6), 3006, 2006 |
| 6 |
Layer thickness-induced lens distortions during thermal nanoimprint Scheer HC, Bogdanski N, Mollenbeck S, Wissen M, Nishilata M, Hirai Y Journal of Vacuum Science & Technology B, 24(6), 3016, 2006 |
| 7 |
Polymer time constants during low temperature nanoimprint lithography Scheer HC, Bogdanski N, Wissen M, Konishi T, Hirai Y Journal of Vacuum Science & Technology B, 23(6), 2963, 2005 |
| 8 |
Impact of residual layer uniformity on UV stabilization after embossing Wissen M, Schulz H, Bogdanski N, Scheer HC, Hirai Y, Kikuta H, Ahrens G, Reuther F, Glinsner T Journal of Vacuum Science & Technology B, 22(6), 3224, 2004 |