검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Molding-based thin film patterning techniques for SiC surface micromachining Song X, Guo S, Zorman CA, Wu CH, Yasseen AA, Mehregany M Materials Science Forum, 338-3, 1141, 2000 |
| 2 |
Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries Yasseen AA, Zorman CA, Mehregany M Journal of the Electrochemical Society, 146(1), 327, 1999 |
| 3 |
Chemical-Mechanical Polishing for Polysilicon Surface Micromachining Yasseen AA, Mourlas NJ, Mehregany M Journal of the Electrochemical Society, 144(1), 237, 1997 |