검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Completion of the beta tool and the recent progress of low energy e-beam proximity projection lithography Endo A, Higuchi A, Nozue H, Shimazu N, Fukui T, Yasumitsu N, Miyatake T, Anazawa N Journal of Vacuum Science & Technology B, 21(1), 311, 2003 |