검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Insights in junction photovoltage based sheet resistance measurements for advanced complementary metal-oxide semiconductor Clarysse T, Moussa A, Zangerle T, Schaus F, Vandervorst W, Faifer V, Current M Journal of Vacuum Science & Technology B, 26(1), 420, 2008 |
| 2 |
Lnfluence of halo implant on leakage current and sheet resistance of ultrashallow p-n junctions Faifer VN, Schroder DK, Current MI, Clarysse T, Timans PJ, Zangerle T, Vandervorst W, Wong TMH, Moussa A, Mccoy S, Gelpey J, Lerch W, Paul S, Bolze D, Halim J Journal of Vacuum Science & Technology B, 25(5), 1588, 2007 |