검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Multi-length scale Monte Carlo simulation of the growth process of SiC film by chemical vapor deposition Liu CX, Yang YQ, Luo X, Zhang RJ, Huang B Applied Surface Science, 255(5), 3342, 2008 |
| 2 |
Atomic scale models of ion implantation and dopant diffusion in silicon Theiss SK, Caturla MJ, Johnson MD, Zhu J, Lenosky T, Sadigh B, de la Rubia TD Thin Solid Films, 365(2), 219, 2000 |