검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of charged particle bombardment and sputtering parameters on the properties of HfO2 films prepared by dc reactive magnetron sputtering Liu X, Li DJ Applied Surface Science, 253(4), 2143, 2006 |
| No. | Article |
|---|---|
| 1 |
Influence of charged particle bombardment and sputtering parameters on the properties of HfO2 films prepared by dc reactive magnetron sputtering Liu X, Li DJ Applied Surface Science, 253(4), 2143, 2006 |